Nanolithography: A Borderland between STM, EB, IB, and X-Ray by M. Gentili,Carlo Giovannella,Stefano Selci

By M. Gentili,Carlo Giovannella,Stefano Selci

good fortune within the fabrication of constructions on the nanometer size scale has unfolded a brand new horizon to condensed topic physics: the research of quantum phenomena in restricted bins, wires, earrings, and so forth. A new type of digital units in keeping with this physics has been proposed, with the promise of a brand new performance for ultrafast and/or ultradense digital circuits. Such purposes call for hugely refined fabrication options, the an important one being lithography.
Nanolithography comprises up to date experiences via significant specialists at the good proven innovations -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- in addition to on emergent options, akin to scanning tunnelling lithography (STL).

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